Achieving High-Quality Post-Cleaning Drying with Non-Contact Marangoni Drying

This equipment is a high-performance Marangoni dryer designed for post-cleaning drying processes for semiconductors, electronic devices, glass disks, optical components, and more.
It achieves low-particle, high-quality drying and contributes to improved product yield.
It enables high-precision drying that minimizes water marks and drying unevenness, making it ideal for precision component manufacturing in clean environments.
Additionally, it offers high compatibility with existing wet process equipment and can be integrated into unified production lines.

1. Achieves low-particle drying
   Suppresses nano-level contamination and achieves high-quality drying
2. Excellent drying performance
   Reduces water marks and drying unevenness through the Marangoni effect
3. Improved productivity through high-speed processing
4. Space-saving design enables easy installation in clean rooms
5. High reliability backed by over 20 years of installation track record
6. Safe drying of thin wafers
   Reduces the risk of damage to thin wafers
7. Compatible with a wide range of substrates
   Applicable to wafers, glass, SiC, GaN, sapphire, and more