PFCs Reduction Device
Product Name
PFCs Reduction Device
Low power consumption, catalytic type
Catalytic PFC Abatement Equipment
・Catalytic PFC abatement equipment utilizes ECOPRO's core technology, a non-metallic catalyst, to abate PFC gas, a typical greenhouse gas.
・There are representative CF4, C2F6, C3H8, CHF3, etc., and other greenhouse gases such as SF6, NF3 can be removed. Although this greenhouse gas is relatively non-toxic, it has a global warming potential that is thousands to tens of thousands of times higher than that of carbon dioxide.
